VSO-Low Flow Miniature Proportional Valve

The VSO® Low Flow valve provides enhanced flow control for applications where precise control flow control is required between 0 – 500 sccm. Like the VSO miniature proportional valve, the VSO® Low Flow miniature proportional valve provides precise flow control of gas in proportion to input current. The valve can be controlled with either DC current or pulse width modulation along with closed loop feedback to deliver optimal system performance. Together with its ability to provide precise control over a wide range of media, the VSO® Low Flow miniature proportional valve is ideally suited for manufacturers of Gas Chromatography and Mass Spectrometry equipment.


  • Enables precise low flow (0 – 500 sccm) control for improved instrument accuracy
  • Thermally compensated to maintain precise flow over a wide range of media
  • Computer automated calibration and serialization for performance traceability
  • Cleaned for Oxygen and Analytical Service use
  • Proven performance tested to 10 million life cycles
  • RoHS compliant


  • Gas chromatography
  • Mass spectrometry
  • Pressure & flow control
  • Mass flow control

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